• DocumentCode
    3450422
  • Title

    Position and Size-Controlled Photosynthesis of Silicon Nanocrystals in SiO2Films

  • Author

    Chen, C.Y. ; Kimura, S. ; Sen, S. ; Nozaki, S. ; Ono, H. ; Uchida, K. ; Morisaki, H.

  • Author_Institution
    The 21st Century COE Program: Coherent Optical Science, The University of Electro-Communications, Chofu-Shi, Tokyo 182-8585, Japan
  • fYear
    2006
  • fDate
    10-13 Jan. 2006
  • Firstpage
    289
  • Lastpage
    292
  • Abstract
    The SiOxthin film made of the SiOxnanoparticles (~40, gm) shows a strong reaction to laser irradiation. The photosynthesis of silicon (Si) nanocrystals (NC´s) is found to be self-limited to the laser power and exposure time. Furthermore, the laser irradiation of the SiOxfilm not only produces Si NC´s, also transforms the SiOxfilm from the powder-like to the continuous. The photosynthesis of Si NC´s has several advantages such as low-temperature process and good control in the size and positioning over the conventional synthesis methods and has many potential applications.
  • Keywords
    Chemical lasers; Infrared spectra; Laser theory; Nanocrystals; Nanoparticles; Optical films; Power lasers; Semiconductor films; Semiconductor thin films; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Emerging Technologies - Nanoelectronics, 2006 IEEE Conference on
  • Print_ISBN
    0-7803-9357-0
  • Type

    conf

  • DOI
    10.1109/NANOEL.2006.1609731
  • Filename
    1609731