• DocumentCode
    3450723
  • Title

    Design of improved microcantilever profile for sensing applications

  • Author

    Mittal, Neha ; Gupta, Navneet

  • Author_Institution
    Department of Electrical and Electronics Engineering, Birla Institute of Technology and Science, Pilani, Rajasthan, INDIA 333031
  • fYear
    2012
  • fDate
    19-21 Dec. 2012
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    In the present work, possibility of improving microcantilever profile for better response as compared to existing profile namely triangular, trapezoidal and invert paddle is explored. This is achieved by doing simulations on MEMS CAD tool (Intellisuite). Performance of the microcantilever is measured on the basis of resonant frequency and static deflection under uniform load. By observing the results, a new microcantilever profile is proposed which gives better sensitivity as compared to existing profiles.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Emerging Technology Trends in Electronics, Communication and Networking (ET2ECN), 2012 1st International Conference on
  • Conference_Location
    Surat, Gujarat, India
  • Print_ISBN
    978-1-4673-1628-6
  • Type

    conf

  • DOI
    10.1109/ET2ECN.2012.6470070
  • Filename
    6470070
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3450723