Title :
KrF Lithography for Si based 2D honey comb lattice pillars
Author :
Mehta, Sohan Singh ; Murthy, Ramana B. ; Singh, Navab
Author_Institution :
Semiconductor Process Technologies Laboratory, Institute of Microelectronics, 11 Science Park Road Singapore 117685; Department of Physics, NUS Singapor
Abstract :
We report 248 nm KrF lithography techniques to fabricate two dimensional (2D) honey comb lattice photonic crystal on 8-inch silicon substrate . Through R-soft simulation we find maximum transverse magnetic (TM) band gap at normalized frequency of 0.322 and pillar diameter of 0.210 um for a lattice constant of 0.5 um . Experimental results show 0.214 um pillar diameter at pitch 0.5 um with good process latitude which is very close to R-soft simulation result
Keywords :
Etching; Fabrication; Frequency; Laboratories; Lattices; Lithography; Photonic band gap; Photonic crystals; Photonic integrated circuits; Silicon;
Conference_Titel :
Emerging Technologies - Nanoelectronics, 2006 IEEE Conference on
Print_ISBN :
0-7803-9357-0
DOI :
10.1109/NANOEL.2006.1609749
