Title :
Mode shape measurement of rectangular quartz plates using a microphone
Author :
Watanabe, Yasuaki ; Niikura, Kentaro ; Yuan, Geng ; Goka, Shigeyoshi ; Fujita, Naoto ; Sekimoto, Hitoshi
Author_Institution :
Graduate Sch. of Eng., Tokyo Metropolitan Univ., Japan
Abstract :
A method for measuring the mode shapes of quartz crystal resonators using an acoustic electrostatic microphone is described. In this method the resonator driving current is strongly modulated, and a needle which is connected to the microphone picks up the modulation signal on the resonator surface. The vibrational patterns are obtained by mapping the detected modulation signals on the resonator surfaces. The experiments were carried out using AT-cut rectangular quartz plates and the results were compared with the calculations
Keywords :
acoustic applications; crystal resonators; electron device testing; microphones; vibration measurement; AT-cut rectangular quartz plates; SiO2; acoustic electrostatic microphone; detected modulation signals; mapping; microphone; mode shape measurement; modulation signal; needle; quartz crystal resonator; rectangular quartz plates; resonator driving current; resonator surface; resonator surfaces; vibrational patterns; Acoustic signal detection; Electrostatic measurements; Microphones; Needles; Optical resonators; Optical surface waves; Probes; Shape measurement; Signal detection; Vibration measurement;
Conference_Titel :
Frequency Control Symposium, 1998. Proceedings of the 1998 IEEE International
Conference_Location :
Pasadena, CA
Print_ISBN :
0-7803-4373-5
DOI :
10.1109/FREQ.1998.717999