DocumentCode
3452158
Title
Intrinsic problem affecting contact hole resolution in hyper NA era
Author
Matsuura, Seiji ; Kurose, Eiji ; Fuji, Kiyoshi
fYear
2004
fDate
Oct. 27-29, 2004
Firstpage
36
Lastpage
37
Keywords
Apertures; Interferometric lithography; Lead compounds; Lighting; Open wireless architecture; Optical control; Optical interferometry; Optical polarization; Space technology; Ultraviolet sources;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN
4-99024720-5
Type
conf
DOI
10.1109/IMNC.2004.245709
Filename
1459459
Link To Document