Silicon Nanotweezers with double actuation and extended stroke for single cell studies

Author

Guillou, Herve ; Lafitte, Nicolas ; Leal, R. ; Jalabert, Laurent ; Fujii, Teruya ; Fujita, Hideaki ; Matsunaga, Y.T. ; Collard, Dominique

Author_Institution

IIS, LIMMS, Univ. of Tokyo, Tokyo, Japan

fYear

2013

fDate

16-20 June 2013

Firstpage

46

Lastpage

49

Abstract

This paper presents an optimized MEMS based Silicon Nanotweezers (SNT) for mechanical diagnostic of biological cell. The innovative features of the design are described. The principle of operation are validated by the characterization of model systems and cell deformation experiment.

Keywords

bioMEMS; biological techniques; biomechanics; cellular biophysics; deformation; radiation pressure; silicon; Si; biological cell; cell deformation experiment; mechanical diagnostic method; model system characterization; optimized MEMS based silicon nanotweezer; silicon nanotweezer design; silicon nanotweezer double actuation; silicon nanotweezer extended stroke; silicon nanotweezer operation principle; single cell study; Biology; Force; Force measurement; Frequency measurement; Resonant frequency; Silicon; Biomechanics; Cell; Cytoskeleton; MEMS; Silicon Nano Tweezers;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6626697

Filename

6626697