Title :
Silicon Nanotweezers with double actuation and extended stroke for single cell studies
Author :
Guillou, Herve ; Lafitte, Nicolas ; Leal, R. ; Jalabert, Laurent ; Fujii, Teruya ; Fujita, Hideaki ; Matsunaga, Y.T. ; Collard, Dominique
Author_Institution :
IIS, LIMMS, Univ. of Tokyo, Tokyo, Japan
Abstract :
This paper presents an optimized MEMS based Silicon Nanotweezers (SNT) for mechanical diagnostic of biological cell. The innovative features of the design are described. The principle of operation are validated by the characterization of model systems and cell deformation experiment.
Keywords :
bioMEMS; biological techniques; biomechanics; cellular biophysics; deformation; radiation pressure; silicon; Si; biological cell; cell deformation experiment; mechanical diagnostic method; model system characterization; optimized MEMS based silicon nanotweezer; silicon nanotweezer design; silicon nanotweezer double actuation; silicon nanotweezer extended stroke; silicon nanotweezer operation principle; single cell study; Biology; Force; Force measurement; Frequency measurement; Resonant frequency; Silicon; Biomechanics; Cell; Cytoskeleton; MEMS; Silicon Nano Tweezers;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6626697
