• DocumentCode
    3452313
  • Title

    Development of SH-SAW Sensing System for Liquids

  • Author

    Kondoh, Jun ; Okiyama, Yusuke ; Mikuni, Satoru ; Matsui, Yoshikazu ; Yatsuda, Hiromi ; Nara, Makoto

  • Author_Institution
    Shizuoka Univ., Shizuoka
  • fYear
    2007
  • fDate
    May 29 2007-June 1 2007
  • Firstpage
    20
  • Lastpage
    24
  • Abstract
    Developments of sensors using surface acoustic wave (SAW) devices have been attractive. A shear horizontal SAW (SH-SAW) sensor can detect liquid properties and chemical reactions in liquid. For practical applications of the SAW sensor, it is necessary to discuss its properties. In this paper, the SH-SAW sensors with a floating electrode unidirectional transducer (FEUDT) or an interdigital transducer (IDT) are compared. Frequency-phase characteristics and frequency-insertion loss profiles are measured. Also, phase shift and amplitude ratio between sample and reference liquids are evaluated. The results indicate that the SH-SAW sensor with the FEUDT has suited for liquid measurements. Then the SH-SAW sensor with FEUDT is mounted in the SH-SAW sensing system. The system configuration is the same of a vector voltmeter measurement system. However, exclusive circuits are developed, so its size is reduced. Using the system, several liquids are measured.
  • Keywords
    electrodes; interdigital transducers; liquids; surface acoustic wave sensors; surface acoustic wave transducers; voltmeters; SH-SAW sensing system; SH-SAW sensor; floating electrode unidirectional transducer; frequency-insertion loss profile measurement; frequency-phase characteristics; interdigital transducer; liquid chemical reactions; liquid properties detection; shear horizontal SAW sensor; surface acoustic wave devices; vector voltmeter measurement system; Acoustic sensors; Acoustic signal detection; Acoustic waves; Chemical sensors; Electrodes; Frequency; Liquids; Sensor phenomena and characterization; Surface acoustic wave devices; Surface acoustic waves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Frequency Control Symposium, 2007 Joint with the 21st European Frequency and Time Forum. IEEE International
  • Conference_Location
    Geneva
  • ISSN
    1075-6787
  • Print_ISBN
    978-1-4244-0646-3
  • Electronic_ISBN
    1075-6787
  • Type

    conf

  • DOI
    10.1109/FREQ.2007.4319022
  • Filename
    4319022