DocumentCode
3452387
Title
Impact of the tunnel etching process on electrical performances of SON devices.
Author
Borel, S. ; Arvei, C. ; Bilde, J. ; Caubet, V. ; Chanemougame, D. ; Monfray, S. ; Ranica, R. ; Skotnick, T.
fYear
2004
fDate
Oct. 27-29, 2004
Firstpage
50
Lastpage
51
Keywords
CMOS process; Dry etching; Electronic mail; Germanium silicon alloys; Manufacturing; Plasma measurements; Process control; Semiconductor films; Silicon germanium; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN
4-99024720-5
Type
conf
DOI
10.1109/IMNC.2004.245716
Filename
1459466
Link To Document