DocumentCode
3452491
Title
A 150 V, 320 MHz, low noise self-aligned double diffused lateral (SADDL) pnp transistor
Author
Sugawara, Y. ; Inaba, M. ; Arakawa, H.
Author_Institution
Res. Lab., Hitachi Ltd., Ibaraki, Japan
fYear
1994
fDate
31 May-3 Jun 1994
Firstpage
419
Lastpage
424
Abstract
For realization of complementary transistors needed in high voltage, high speed analog ICs, high voltage, high performances lateral pnp transistors have been developed by utilizing the SADDL transistor structure. The developed lateral pnp transistor has a high hFE of l00, high fT of 320 MHz and low noise figure of 3 dB in spite of a high BVCEO of 150 V. When BVCEO of the developed SADDL transistor is 340 V, hFE is 50 and fT is 120 MHz. These fT´s are about 5 times those of the best conventional lateral pnp transistors with the same BVCEO, as reported to date
Keywords
semiconductor device noise; 120 to 320 MHz; 150 to 340 V; 3 dB; SADDL transistor structure; complementary transistors; double diffused lateral transistor; high speed analog ICs; high voltage operation; low noise device; pnp transistor; self-aligned process; CMOSFETs; Dielectric devices; Electric variables; Fabrication; Hafnium; Isolation technology; Niobium compounds; Noise figure; Transistors; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Power Semiconductor Devices and ICs, 1994. ISPSD '94., Proceedings of the 6th International Symposium on
Conference_Location
Davos
ISSN
1063-6854
Print_ISBN
0-7803-1494-8
Type
conf
DOI
10.1109/ISPSD.1994.583815
Filename
583815
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