• DocumentCode
    3452520
  • Title

    Formation of iron nano-dots by electron beam induced deposition using an ultrahigh vacuum transmission electron microscope

  • Author

    Tanaka, M. ; Chu, F. ; Shimojo, M. ; Takeguchi, M. ; Furuya, K.

  • fYear
    2004
  • fDate
    Oct. 27-29, 2004
  • Firstpage
    60
  • Lastpage
    61
  • Keywords
    Annealing; Electron beams; Fabrication; Iron; Materials science and technology; Pollution measurement; Probes; Scanning electron microscopy; Substrates; Transmission electron microscopy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
  • Print_ISBN
    4-99024720-5
  • Type

    conf

  • DOI
    10.1109/IMNC.2004.245722
  • Filename
    1459472