DocumentCode
3452520
Title
Formation of iron nano-dots by electron beam induced deposition using an ultrahigh vacuum transmission electron microscope
Author
Tanaka, M. ; Chu, F. ; Shimojo, M. ; Takeguchi, M. ; Furuya, K.
fYear
2004
fDate
Oct. 27-29, 2004
Firstpage
60
Lastpage
61
Keywords
Annealing; Electron beams; Fabrication; Iron; Materials science and technology; Pollution measurement; Probes; Scanning electron microscopy; Substrates; Transmission electron microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN
4-99024720-5
Type
conf
DOI
10.1109/IMNC.2004.245722
Filename
1459472
Link To Document