DocumentCode
3452588
Title
Fabrication of low line edge roughness mold by SOG replica method
Author
Kurashima, Y. ; Hiroshima, H. ; Komuro, M. ; Yamazaki, N. ; Taniguchi, J. ; Miyamoto, I.
fYear
2004
fDate
Oct. 27-29, 2004
Firstpage
66
Lastpage
67
Keywords
Atomic force microscopy; Atomic measurements; Etching; Fabrication; Force measurement; Rough surfaces; Scanning electron microscopy; Semiconductor films; Standards development; Surface roughness;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN
4-99024720-5
Type
conf
DOI
10.1109/IMNC.2004.245725
Filename
1459475
Link To Document