DocumentCode
3452623
Title
Reproducibility of photo-nanoimprint
Author
Hiroshima, H. ; Kurashima, Y. ; Komuro, M.
fYear
2004
fDate
Oct. 27-29, 2004
Firstpage
70
Lastpage
71
Keywords
Atomic force microscopy; Calibration; Degradation; Distortion measurement; Image edge detection; Image resolution; Nanolithography; Nonlinear distortion; Polymers; Reproducibility of results;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN
4-99024720-5
Type
conf
DOI
10.1109/IMNC.2004.245727
Filename
1459477
Link To Document