• DocumentCode
    3452627
  • Title

    Fabrication methods for integrated biosensors

  • Author

    Gregory, C.M. ; Hatfield, J V

  • Author_Institution
    Dept. of Electr. Eng. & Electron., Univ. of Manchester Inst. of Sci. & Technol., UK
  • fYear
    1995
  • fDate
    35040
  • Firstpage
    42644
  • Lastpage
    42648
  • Abstract
    The use of sensors in medical and environmental applications is increasing rapidly. Biosensors make up a proportion of this market. By modifying fabrication techniques from the well established electronics industry the manufacture of cheap and reliable biosensors could be realised alongside the development of integrated biosensors. By incorporating the necessary electronics on the same substrate as the sensor, noise and cost could be reduced. All steps for the fabrication of the sensor part of an integrated glucose sensor have been developed, along with a useful technique for the deposition of polymer membranes. The set polymer must not be soluble in acetone for this technique to work
  • Keywords
    biomembranes; biosensors; electrochemical analysis; electrochemical electrodes; etching; photoresists; chemically sensitive membranes; diffusion limited enzyme electrodes; etched; fabrication methods; integrated biosensors; integrated glucose sensor; photoresist; polymer membrane deposition; reduced cost; reduced noise; reliable biosensors; tri-layer lift-off technique;
  • fLanguage
    English
  • Publisher
    iet
  • Conference_Titel
    Advances in Sensors, IEE Colloquium on
  • Conference_Location
    London
  • Type

    conf

  • DOI
    10.1049/ic:19951514
  • Filename
    495024