• DocumentCode
    3452680
  • Title

    Water-soluble sacrificial layer enables ultra low-cost LOC integration of magnetic resonance microcoils with 100% filling factor

  • Author

    Gruschke, O.G. ; Kamberger, R. ; Hofflin, J. ; Korvink, J.G.

  • Author_Institution
    Dept. of Microsyst. Eng. - IMTEK, Univ. of Freiburg, Freiburg, Germany
  • fYear
    2013
  • fDate
    16-20 June 2013
  • Firstpage
    132
  • Lastpage
    134
  • Abstract
    We present a novel fabrication process for low-cost, high-aspect ratio magnetic resonance (MR) helical transceiver microcoils wound with an automated wirebonder. Previously reported microcoils [1] required a permanent hollow post to stabilise the coil´s wire, but which simultaneously reduced the sample volume, and thus the signal-to-noise ratio (SNR). An image acquired of an ionised water sample (1 g/l CuSO4) in an 11.7 T spectrometer yields a signal-to-noise ratio of 17 for an in-plane resolution of 15 × 15 μm2 in an acquisition time of 05:07 min.
  • Keywords
    coils; magnetic resonance imaging; micromechanical devices; signal processing equipment; transceivers; CuSO4; automated wirebonder; fabrication process; helical transceiver microcoil; ionised water sample; magnetic resonance microcoil; ultra low cost LOC integration; water soluble sacrificial layer; Coils; Glass; Gold; Magnetic resonance; Signal to noise ratio; Wires; Air Core; Magnetic Resonance; Transceive Radio-Frequency (r.f.) Microcoil; Wirebonder;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
  • Conference_Location
    Barcelona
  • Type

    conf

  • DOI
    10.1109/Transducers.2013.6626719
  • Filename
    6626719