• DocumentCode
    3452755
  • Title

    Temperature dependence of electrical properties for free-pace-nanowlying fabricated by FIB-CVD

  • Author

    Morita, Takahiko ; Kondo, Kazushige ; Kanda, K. ; Haruyama, Yuichi ; Kaito, Takashi ; Fujita, Jun-ichi ; Ichihashi, T. ; Ochiai, Yukinori ; Tajima, Tsutomu ; Matsui, Shinji

  • fYear
    2004
  • fDate
    Oct. 27-29, 2004
  • Firstpage
    80
  • Lastpage
    81
  • Keywords
    Conductivity; Electrodes; Fabrication; Gases; Joining processes; Nanoscale devices; Nanotechnology; Temperature dependence; Temperature measurement; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
  • Print_ISBN
    4-99024720-5
  • Type

    conf

  • DOI
    10.1109/IMNC.2004.245732
  • Filename
    1459482