DocumentCode
3452755
Title
Temperature dependence of electrical properties for free-pace-nanowlying fabricated by FIB-CVD
Author
Morita, Takahiko ; Kondo, Kazushige ; Kanda, K. ; Haruyama, Yuichi ; Kaito, Takashi ; Fujita, Jun-ichi ; Ichihashi, T. ; Ochiai, Yukinori ; Tajima, Tsutomu ; Matsui, Shinji
fYear
2004
fDate
Oct. 27-29, 2004
Firstpage
80
Lastpage
81
Keywords
Conductivity; Electrodes; Fabrication; Gases; Joining processes; Nanoscale devices; Nanotechnology; Temperature dependence; Temperature measurement; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN
4-99024720-5
Type
conf
DOI
10.1109/IMNC.2004.245732
Filename
1459482
Link To Document