DocumentCode

3452902

Title

Exploring Low Temperature Poly-Si for Low Cost and Low Power Sub-micron Digital Operation

Author

Li, Jing ; Bansal, Aditya ; Roy, Kaushik

Author_Institution

School of ECE, Purdue University, West Lafayette, IN 47907, Email: li147@purdue.edu

fYear

2006

fDate

26-28 June 2006

Firstpage

61

Lastpage

62

Keywords

Costs; Crystallization; Dielectric substrates; Digital circuits; Fabrication; Grain boundaries; Grain size; Silicon; Temperature; Thin film transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Device Research Conference, 2006 64th

Conference_Location

State College, PA, USA

ISSN

1548-3770

Print_ISBN

0-7803-9748-7

Type

conf

DOI

10.1109/DRC.2006.305118

Filename

4097535