• DocumentCode
    3452907
  • Title

    Optimizing operational parameters for Z-pinch EUV source by artificial neural network (ANN)

  • Author

    Zhang, C.H. ; Kaisaki, S. ; Kimura, A. ; Fukumoto, H. ; Namihira, T. ; Akiyama, H.

  • fYear
    2004
  • fDate
    Oct. 27-29, 2004
  • Firstpage
    90
  • Lastpage
    91
  • Keywords
    Artificial neural networks; Fault location; Fluid flow; Neurons; Physics; Plasma measurements; Plasma simulation; Plasma sources; Predictive models; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
  • Print_ISBN
    4-99024720-5
  • Type

    conf

  • DOI
    10.1109/IMNC.2004.245738
  • Filename
    1459488