DocumentCode :
3452938
Title :
Effect of interfacial PdNi concentration on time response of Si-based electrodeposited hydrogen sensors
Author :
Dong, Lixin ; De Groot, C.H. ; Usgaocar, A. ; Chavagnac, V.
Author_Institution :
Electron. & Comput. Sci., Univ. of Southampton, Southampton, UK
fYear :
2013
fDate :
16-20 June 2013
Firstpage :
190
Lastpage :
193
Abstract :
This paper presents Hydrogen sensors based upon electrodeposited PdNi-Si Schottky barriers which have been fabricated with a gradient structure in the PdNi concentration in a single electrodeposition run through variation of the deposition potential. The resulting sensors in the back to back diode configuration show very low idle leakage current and good sensitivity to hydrogen. The structure with increased Ni concentration at the PdNi-Si interface shows dramatically improved time response as compared to the uniform concentration sample. I-V and C-V characteristics of these hydrogen sensors also depicts in this paper to determine the Schottky barrier height and ideality factor.
Keywords :
Schottky barriers; electrodeposition; elemental semiconductors; gas sensors; hydrogen; leakage currents; nickel alloys; palladium alloys; semiconductor-metal boundaries; silicon; C-V characteristics; H; I-V characteristics; PdNi-Si; Schottky barrier height; Si-based electrodeposited hydrogen sensors; electrodeposited PdNi-Si Schottky barriers; gradient structure; hydrogen sensitivity; ideality factor; interfacial PdNi concentration; leakage current; time response; Films; Hydrogen; Nickel; Schottky barriers; Sensor phenomena and characterization; Silicon; Schottky barrier; fast response; low power consumption; variable structures;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
Type :
conf
DOI :
10.1109/Transducers.2013.6626734
Filename :
6626734
Link To Document :
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