• DocumentCode
    3452938
  • Title

    Effect of interfacial PdNi concentration on time response of Si-based electrodeposited hydrogen sensors

  • Author

    Dong, Lixin ; De Groot, C.H. ; Usgaocar, A. ; Chavagnac, V.

  • Author_Institution
    Electron. & Comput. Sci., Univ. of Southampton, Southampton, UK
  • fYear
    2013
  • fDate
    16-20 June 2013
  • Firstpage
    190
  • Lastpage
    193
  • Abstract
    This paper presents Hydrogen sensors based upon electrodeposited PdNi-Si Schottky barriers which have been fabricated with a gradient structure in the PdNi concentration in a single electrodeposition run through variation of the deposition potential. The resulting sensors in the back to back diode configuration show very low idle leakage current and good sensitivity to hydrogen. The structure with increased Ni concentration at the PdNi-Si interface shows dramatically improved time response as compared to the uniform concentration sample. I-V and C-V characteristics of these hydrogen sensors also depicts in this paper to determine the Schottky barrier height and ideality factor.
  • Keywords
    Schottky barriers; electrodeposition; elemental semiconductors; gas sensors; hydrogen; leakage currents; nickel alloys; palladium alloys; semiconductor-metal boundaries; silicon; C-V characteristics; H; I-V characteristics; PdNi-Si; Schottky barrier height; Si-based electrodeposited hydrogen sensors; electrodeposited PdNi-Si Schottky barriers; gradient structure; hydrogen sensitivity; ideality factor; interfacial PdNi concentration; leakage current; time response; Films; Hydrogen; Nickel; Schottky barriers; Sensor phenomena and characterization; Silicon; Schottky barrier; fast response; low power consumption; variable structures;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
  • Conference_Location
    Barcelona
  • Type

    conf

  • DOI
    10.1109/Transducers.2013.6626734
  • Filename
    6626734