DocumentCode
3453002
Title
Numerical investigation of defect printability in extreme ultraviolet (EUV) reflector: Ru/Mo/Si mulitlayer system
Author
Kaug, I. ; Ahn, Jinho ; Oh, Hye-Keun ; Chung, Yong-Chae
fYear
2004
fDate
Oct. 27-29, 2004
Firstpage
98
Lastpage
99
Keywords
Ceramics; Materials science and technology; Optical distortion; Optical scattering; Optical surface waves; Phase distortion; Physics; Reflectivity; Solid modeling; Ultraviolet sources;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN
4-99024720-5
Type
conf
DOI
10.1109/IMNC.2004.245742
Filename
1459492
Link To Document