DocumentCode
3453021
Title
Characteristics of Mo/Ru/Si multilayer reflector structure
Author
Kim, Tae Geun ; Kim, Woo Sam ; Kang, In-Yong ; Yong-Chae Chung ; Ahn, Jinho
fYear
2004
fDate
Oct. 27-29, 2004
Firstpage
100
Lastpage
101
Keywords
Annealing; Atomic measurements; Ceramics; Commercialization; Heating; Lithography; Nonhomogeneous media; Optical films; Reflectivity; Ultraviolet sources;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN
4-99024720-5
Type
conf
DOI
10.1109/IMNC.2004.245743
Filename
1459493
Link To Document