A MEMS platform for the dielectrophoretic and thermoelectric characterization of Bi2Te3 nanowires

Author

Wang, Zhen ; Toellner, W. ; Adhikari, S.S. ; Kroener, M. ; Kojda, D. ; Mitdank, R. ; Fischer, S.F. ; Nielsch, K. ; Woias, P.

Author_Institution

Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg, Germany

fYear

2013

fDate

16-20 June 2013

Firstpage

222

Lastpage

225

Abstract

We demonstrate the fabrication and use of our second generation Thermoelectric Nanowire Characterization Platforms (TNCP). The design of this TNCP results from an extensive experimental study on dielectrophoretic (DEP) nanowire manipulation and placement on a DEP test structures. These TNCPs fabricated with optimally designed DEP electrodes have enhanced the nanowire assembly yield up to 90%. As a practical application, measurements of electrical conductivity (σ) and Seebeck coefficient (S) of an individual Bi₂Te₃ NW are reported. Finally, another novel method for NW assembly is introduced, using an optical tweezers.

Keywords

Seebeck effect; bismuth compounds; electrical conductivity measurement; electrophoresis; microassembling; microfabrication; nanofabrication; nanowires; radiation pressure; test equipment; thermal conductivity measurement; DEP electrode design; DEP test structure; MEMS; Seebeck coefficient measurement; TNCP fabrication; dielectrophoretic; electrical conductivity measurement; nanowire assembly; nanowire manipulation; optical tweezer; thermoelectric nanowire characterization platform; Assembly; Conductivity; Dielectrophoresis; Electrodes; Force; Nanowires; Optical device fabrication; Bi2Te3 nanowire; DEP test structure; TNCP; dielectrophoresis; nanowire assembly; optical tweezers;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6626742

Filename

6626742