Title :
Extension of the Legendre polynomial approach for analyzing composite BAW resonators
Author :
Raherison, A. ; Ratolojanahary, F.E. ; Lefebvre, J.E. ; Gryba, T. ; Ntagwirumugara, E.
Author_Institution :
Univ. de Fianarantsoa, Fianarantsoa
fDate :
May 29 2007-June 1 2007
Abstract :
We present a new ID resonator modeling through a polynomial approach. We have determined, for different values of the metallization thickness, the series and parallel resonance frequencies, the field profiles within the structure, and the effective electromechanical coupling coefficient and the Q-factor as well. To assess and validate the approach, the results are compared against other calculations from the literature.
Keywords :
Legendre polynomials; Q-factor; acoustic resonators; bulk acoustic wave devices; metallisation; ID resonator modeling; Legendre polynomial approach; Q-factor; composite BAW resonators; effective electromechanical coupling coefficient; metallization thickness; Acoustic propagation; Acoustic waves; Convergence; Electrodes; Frequency; Harmonic analysis; Metallization; Polynomials; Q factor; Voltage;
Conference_Titel :
Frequency Control Symposium, 2007 Joint with the 21st European Frequency and Time Forum. IEEE International
Conference_Location :
Geneva
Print_ISBN :
978-1-4244-0646-3
Electronic_ISBN :
1075-6787
DOI :
10.1109/FREQ.2007.4319066
