Experimental evaluation of arrayed microcolumn with a monolithic structure

Author

Jeong, J.W. ; Kim, D.J. ; Kim, H.S. ; Choi, S.K. ; Kim, D.Y.

fYear

2004

fDate

Oct. 27-29, 2004

Firstpage

110

Lastpage

111

Keywords

Assembly; Electron beams; Electron emission; Lenses; Lithography; Microoptics; Moon; Optical microscopy; Silicon; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International

Print_ISBN

4-99024720-5

Type

DOI

10.1109/IMNC.2004.245748

Filename

1459498

Link To Document