Title :
Integrated structure including a waveguide and a photodiode for a chemo-optical sensor on silicon
Author :
Caldararu, M. ; Craciunoiu, Florin ; Caldararu, F. ; Dascalu, Dan ; Paraschiv, Anca ; Vasilescu, Adrian
Author_Institution :
Ecosen Ltd., Bucharest, Romania
Abstract :
The paper describes the design of an absorptive chemo-optical sensor. The sensor includes an integrated silicon structure, composed of waveguides coupled to photodiodes. The transducer is a chemical layer, whose absorption coefficient is dependent on the concentration of an external substance. First experimental results are also presented
Keywords :
chemical sensors; elemental semiconductors; optical planar waveguides; optical sensors; photodiodes; silicon; Si; absorption coefficient; absorptive chemo-optical sensor; chemical layer transducer; integrated waveguide/photodiode structure; optical waveguides; Image sensors; Maxwell equations; Photodiodes; Silicon; Waveguide components;
Conference_Titel :
Semiconductor Conference, 1995. CAS'95 Proceedings., 1995 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-2647-4
DOI :
10.1109/SMICND.1995.495057
