DocumentCode
3453191
Title
Integrated structure including a waveguide and a photodiode for a chemo-optical sensor on silicon
Author
Caldararu, M. ; Craciunoiu, Florin ; Caldararu, F. ; Dascalu, Dan ; Paraschiv, Anca ; Vasilescu, Adrian
Author_Institution
Ecosen Ltd., Bucharest, Romania
fYear
1995
fDate
11-14 Oct 1995
Firstpage
449
Lastpage
452
Abstract
The paper describes the design of an absorptive chemo-optical sensor. The sensor includes an integrated silicon structure, composed of waveguides coupled to photodiodes. The transducer is a chemical layer, whose absorption coefficient is dependent on the concentration of an external substance. First experimental results are also presented
Keywords
chemical sensors; elemental semiconductors; optical planar waveguides; optical sensors; photodiodes; silicon; Si; absorption coefficient; absorptive chemo-optical sensor; chemical layer transducer; integrated waveguide/photodiode structure; optical waveguides; Image sensors; Maxwell equations; Photodiodes; Silicon; Waveguide components;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 1995. CAS'95 Proceedings., 1995 International
Conference_Location
Sinaia
Print_ISBN
0-7803-2647-4
Type
conf
DOI
10.1109/SMICND.1995.495057
Filename
495057
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