Title :
Low energy electron beam lithography with microcolumn
Author :
Han, Changho ; Kim, Hak ; Kim, Jinkwang ; Chun, Kukjin
Keywords :
Assembly; Dielectric substrates; Electrodes; Electron beams; Glass; Lenses; Lithography; Micromechanical devices; Silicon; Wires;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
DOI :
10.1109/IMNC.2004.245749
