DocumentCode
3453254
Title
Current Collapse-Free Vertical Submicron Channel GaN-based Transistors with InAlGaN Quaternary Alloy Contact Layers
Author
Morita, Tatsuo ; Nakazawa, Satoshi ; Ueda, Tetsuzo ; Tanaka, Tsuyoshi
Author_Institution
Semiconductor Device Research Center, Semiconductor Company, Matsushita Electric Industrial Co. Ltd., 1 Kotari-Yakemachi, Nagaokakyo-shi, Kyoto 617-8520, JAPAN. Email: morita.tatsuo@jp.panasonic.com /Phone:+81-75-956-9055 /Fax:+81-75-956-9110
fYear
2006
fDate
26-28 June 2006
Firstpage
97
Lastpage
98
Keywords
Aluminum gallium nitride; Current density; Current-voltage characteristics; Electrodes; Gallium nitride; Metalworking machines; Ohmic contacts; Pulse measurements; Scanning electron microscopy; Semiconductor devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Device Research Conference, 2006 64th
Conference_Location
State College, PA, USA
ISSN
1548-3770
Print_ISBN
0-7803-9748-7
Type
conf
DOI
10.1109/DRC.2006.305136
Filename
4097553
Link To Document