Title :
Current dependency of sub-surface charging of insulators under electron beam irradiation
Author :
Matsumoto, Yoshifumi ; Kotera, Masatoshi
Keywords :
Conducting materials; Current density; Dielectric constant; Dielectric materials; Dielectrics and electrical insulation; Electron beams; Poisson equations; Shape; Surface charging; X-rays;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
DOI :
10.1109/IMNC.2004.245751
