مرکز منطقه ای اطلاع رساني علوم و فناوري - Nanoimprint and lift-off process using poly vinyl alcohol

DocumentCode :

3453343

Title :

Nanoimprint and lift-off process using poly vinyl alcohol

Author :

Nakamatsu, Ken-ichiro ; Tone, Katsuhiko ; Ohtake, Toshihito ; Tabata, Hitoshi ; Matsui, Shinji

fYear :

2004

fDate :

Oct. 27-29, 2004

Firstpage :

120

Lastpage :

121

Keywords :

Costs; Etching; Gold; Nanoscale devices; Nanostructured materials; Polymers; Resins; Resists; Solvents; Throughput;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International

Print_ISBN :

4-99024720-5

Type :

conf

DOI :

10.1109/IMNC.2004.245753

Filename :

1459503

Link To Document :