DocumentCode
3453374
Title
Determination of resonance frequency and sensitivity of resonant microsensors with electrostatic excitation and capacitive detection
Author
Moldovan, Carmen ; Babarada, Florin ; Stefanescu, Bogdan ; Moldovan, Romulus
Author_Institution
Inst. of Microtechnol., Bucharest, Romania
fYear
1995
fDate
11-14 Oct 1995
Firstpage
485
Lastpage
488
Abstract
This work presents the results obtained through simulation of a microresonant sensor resonance frequency and sensitivity, using the conservation energy and Rayleigh´s approximation method. The results are used for the project and design of the resonant microbridge and excitation-detection circuits
Keywords
approximation theory; capacitance; electrostatic devices; microsensors; resonance; sensitivity; Rayleigh approximation method; capacitive detection; conservation energy; electrostatic excitation; resonance frequency; resonant microbridge; resonant microsensors; sensitivity; simulation; Bridges; Building materials; Electrostatics; Kinetic theory; Microsensors; Potential energy; Resonance; Resonant frequency;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 1995. CAS'95 Proceedings., 1995 International
Conference_Location
Sinaia
Print_ISBN
0-7803-2647-4
Type
conf
DOI
10.1109/SMICND.1995.495066
Filename
495066
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