DocumentCode :
3453444
Title :
Press velocity dependence in nanoimprint lithography
Author :
Yoshikawa, T. ; Takagi, Naofumi ; Kanakugi, T. ; Schulz, H. ; Scheer, H.-C. ; Hirai, Y.
fYear :
2004
fDate :
Oct. 27-29, 2004
Firstpage :
128
Lastpage :
129
Keywords :
Frequency measurement; Mechanical factors; Mechanical variables measurement; Microstructure; Nanolithography; Polymers; Strain measurement; Thermal engineering; Vibration measurement; Viscosity;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
Type :
conf
DOI :
10.1109/IMNC.2004.245757
Filename :
1459507
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3453444
