Nanochannels for DNA stretching fabricated by standard cleanroom processing and nanoimprint lithography

Author

Bilenberg, Brian ; Pastore, Carine ; Nielsen, Theodor ; Enghoff, Simon Riis ; Jeppesen, Claus ; Larsen, Asger Vig ; Kristensen, Anders

fYear

2004

fDate

Oct. 27-29, 2004

Firstpage

134

Lastpage

135

Keywords

DNA; Etching; Fabrication; Lab-on-a-chip; Nanolithography; Oxidation; Polymer films; Resists; Silicon; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International

Print_ISBN

4-99024720-5

Type

DOI

10.1109/IMNC.2004.245760

Filename

1459510

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