Direct imprint in metal film stacks with low pressure and low temperature for optical elements applications

Author

Cheng, H.C. ; Chuang, S.Y. ; Chen, H.L. ; Hung, Y.L. ; Ko, F.H.

fYear

2004

fDate

Oct. 27-29, 2004

Firstpage

138

Lastpage

139

Keywords

Glass; Gold; Lithography; Optical devices; Optical distortion; Optical films; Optical microscopy; Resists; Scanning electron microscopy; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International

Print_ISBN

4-99024720-5

Type

DOI

10.1109/IMNC.2004.245762

Filename

1459512

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