Title :
Direct imprint in metal film stacks with low pressure and low temperature for optical elements applications
Author :
Cheng, H.C. ; Chuang, S.Y. ; Chen, H.L. ; Hung, Y.L. ; Ko, F.H.
Keywords :
Glass; Gold; Lithography; Optical devices; Optical distortion; Optical films; Optical microscopy; Resists; Scanning electron microscopy; Temperature;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
DOI :
10.1109/IMNC.2004.245762
