Title :
Film thickness dependence on frequency-temperature characteristics for AT-cut bar resonators
Author :
NAKAZAWA, Mitsuo ; Yamamoto, Fumiaki ; Sawai, Daisuke ; Kadosaki, Koichi
Author_Institution :
Shinshu Univ., Nagano, Japan
Abstract :
Analysis and experimental results regarding frequency temperature vs. electrode film thickness characteristics for AT cut bar resonators are described. A quadric relationship between frequency turn-over temperature and electrode film thickness for AT-cut bar resonators was obtained theoretically. A new electrical equivalent model for film thickness of AT-cut resonator was proposed and the equivalent model was experimentally confirmed
Keywords :
capacitance; crystal resonators; equivalent circuits; piezoelectric oscillations; vibrations; AT-cut bar resonators; electrical equivalent model; electrode film thickness; film thickness dependence; frequency turn-over temperature; frequency-temperature characteristics; quadric relationship; quartz resonators; Ceramics; Electric resistance; Electrodes; Equations; Equivalent circuits; Frequency; Manufacturing; Q factor; Shape; Temperature dependence;
Conference_Titel :
Frequency Control Symposium, 1998. Proceedings of the 1998 IEEE International
Conference_Location :
Pasadena, CA
Print_ISBN :
0-7803-4373-5
DOI :
10.1109/FREQ.1998.718017
