DocumentCode
3453947
Title
Smart silicon sensors/actuators
Author
Andrei, Radu G.
Author_Institution
Motorola Inc., Phoenix, AZ, USA
fYear
1995
fDate
11-14 Oct 1995
Firstpage
619
Lastpage
622
Abstract
Smart sensors and system integration concepts are different in nature and they complement each other. Smart sensors will bring about significant technical and commercial benefits that cannot be delivered by highly integrated systems. Motorola´s broad technology portfolio is the prerequisite for a program that aims at building a full complement of smart sensors. The program utilizes micromachining, sensing, packaging, analog and digital signal processing and other technologies
Keywords
elemental semiconductors; intelligent actuators; intelligent sensors; microactuators; micromachining; microsensors; packaging; sensor fusion; silicon; Motorola; Si; micromachining; packaging; signal processing; smart actuators; smart sensors; Gases; Intelligent actuators; Intelligent sensors; Microcontrollers; Reactive power; Sensor systems; Silicon; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 1995. CAS'95 Proceedings., 1995 International
Conference_Location
Sinaia
Print_ISBN
0-7803-2647-4
Type
conf
DOI
10.1109/SMICND.1995.495092
Filename
495092
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