Title :
Smart silicon sensors/actuators
Author_Institution :
Motorola Inc., Phoenix, AZ, USA
Abstract :
Smart sensors and system integration concepts are different in nature and they complement each other. Smart sensors will bring about significant technical and commercial benefits that cannot be delivered by highly integrated systems. Motorola´s broad technology portfolio is the prerequisite for a program that aims at building a full complement of smart sensors. The program utilizes micromachining, sensing, packaging, analog and digital signal processing and other technologies
Keywords :
elemental semiconductors; intelligent actuators; intelligent sensors; microactuators; micromachining; microsensors; packaging; sensor fusion; silicon; Motorola; Si; micromachining; packaging; signal processing; smart actuators; smart sensors; Gases; Intelligent actuators; Intelligent sensors; Microcontrollers; Reactive power; Sensor systems; Silicon; Transducers;
Conference_Titel :
Semiconductor Conference, 1995. CAS'95 Proceedings., 1995 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-2647-4
DOI :
10.1109/SMICND.1995.495092
