Inversion-mode Operation of Thermally-oxidized Modulation-doped Silicon Nanowire Field Effect Devices

Author

Wang, Yanfeng ; Ho, Tsung-ta ; Dilts, Sarah ; Lew, Kok-Keong ; Liu, Bangzhi ; Mohney, Suzanne ; Redwing, Joan ; Mayer, Theresa

Author_Institution

Department of Electrical Engineering, The Pennsylvania State University, University Park, PA 16802

fYear

2006

fDate

26-28 June 2006

Firstpage

175

Lastpage

176

Keywords

Dielectric substrates; Electrons; Epitaxial layers; FETs; Gold; Nanoscale devices; Oxidation; Silicon; Thermal engineering; Wires;

fLanguage

English

Publisher

ieee

Conference_Titel

Device Research Conference, 2006 64th

Conference_Location

State College, PA, USA

ISSN

1548-3770

Print_ISBN

0-7803-9748-7

Type

DOI

10.1109/DRC.2006.305172

Filename

4097589

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