Title :
Inversion-mode Operation of Thermally-oxidized Modulation-doped Silicon Nanowire Field Effect Devices
Author :
Wang, Yanfeng ; Ho, Tsung-ta ; Dilts, Sarah ; Lew, Kok-Keong ; Liu, Bangzhi ; Mohney, Suzanne ; Redwing, Joan ; Mayer, Theresa
Author_Institution :
Department of Electrical Engineering, The Pennsylvania State University, University Park, PA 16802
Keywords :
Dielectric substrates; Electrons; Epitaxial layers; FETs; Gold; Nanoscale devices; Oxidation; Silicon; Thermal engineering; Wires;
Conference_Titel :
Device Research Conference, 2006 64th
Conference_Location :
State College, PA, USA
Print_ISBN :
0-7803-9748-7
DOI :
10.1109/DRC.2006.305172
