DocumentCode :
3454125
Title :
Response Surface Methodology and its Application in Simulation
Author :
Hood, Sarah J. ; Welch, Peter D.
Author_Institution :
IBM T.J. Watson Research Center Yorktown Heights, NY
fYear :
1993
fDate :
12-15 Dec 1993
Firstpage :
115
Lastpage :
122
Keywords :
Books; Context modeling; Cost function; Fitting; Optimization methods; Polynomials; Random variables; Response surface methodology; Semiconductor device manufacture; Virtual manufacturing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Simulation Conference Proceedings, 1993. Winter
Print_ISBN :
0-7803-1381-X
Type :
conf
DOI :
10.1109/WSC.1993.718036
Filename :
718036
Link To Document :
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