DocumentCode
3454125
Title
Response Surface Methodology and its Application in Simulation
Author
Hood, Sarah J. ; Welch, Peter D.
Author_Institution
IBM T.J. Watson Research Center Yorktown Heights, NY
fYear
1993
fDate
12-15 Dec 1993
Firstpage
115
Lastpage
122
Keywords
Books; Context modeling; Cost function; Fitting; Optimization methods; Polynomials; Random variables; Response surface methodology; Semiconductor device manufacture; Virtual manufacturing;
fLanguage
English
Publisher
ieee
Conference_Titel
Simulation Conference Proceedings, 1993. Winter
Print_ISBN
0-7803-1381-X
Type
conf
DOI
10.1109/WSC.1993.718036
Filename
718036
Link To Document