High-Performance Nanomechanical Oscillators Fabricated by Bottom-up Integration of Silicon Nanowires

Author

Li, Mingwei ; Bhiladvala, Rustom B. ; Sioss, James A. ; Lew, Kok-Keong ; Redwing, Joan M. ; Keating, Christine D. ; Mayer, Theresa S.

Author_Institution

Department of Electrical Engineering, The Pennsylvania State University, University Park, PA 16802, USA

fYear

2006

fDate

26-28 June 2006

Firstpage

185

Lastpage

186

Keywords

Frequency; Gold; Laser beams; Nanoparticles; Nanowires; Oscillators; Q factor; Resists; Resonance; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Device Research Conference, 2006 64th

Conference_Location

State College, PA, USA

ISSN

1548-3770

Print_ISBN

0-7803-9748-7

Type

DOI

10.1109/DRC.2006.305049

Filename

4097593

Link To Document