Title :
A thin film passive magnetic field sensor operated at 425 MHz
Author :
Bodong Li ; Kosel, Jurgen
Author_Institution :
King Abdullah Univ. of Sci. & Technol., Thuwal, Saudi Arabia
Abstract :
A passive, magnetic field sensor consisting of a 425 MHz surface acoustic wave (SAW) transponder loaded with a giant magnetoimpedance (GMI) element is developed. The transponder, consisting of two interdigital transducers (IDTs) and the GMI element, a multilayer structure composed of Ni80Fe20/Cu/Ni80Fe20, are fabricated on a 128° Y-X cut LiNbO3 substrate. The integrated sensor is characterized with a network analyzer through an S-parameter measurement. Upon the application of a magnetic field, a maximum amplitude change and phase shift of 2.7 dB and 20 degree, respectively, are observed. Within the linear region, the magnetic sensitivity is 3870 dB/T and the resolution is 1.3 μT.
Keywords :
S-parameters; copper; giant magnetoresistance; interdigital transducers; iron alloys; magnetic field measurement; magnetic multilayers; magnetic sensors; nickel alloys; sensitivity; surface acoustic wave devices; thin film sensors; GMI element; IDT; LiNbO3; Ni80Fe20-Cu-Ni80Fe20; S-parameter measurement; SAW transponder; frequency 425 MHz; giant magnetoimpedance element; interdigital transducers; magnetic sensitivity; maximum amplitude change; multilayer structure; network analyzer; phase shift; surface acoustic wave transponder; thin film passive magnetic field sensor; Magnetic field measurement; Magnetic fields; Magnetic multilayers; Magnetoacoustic effects; Sensitivity; Substrates; Surface acoustic waves; GMI; Magnetoimpedance; Passive Sensor; SAW; Surface Acoustic Wave; Wireless Magnetic Sensor;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6626804
