A thin film passive magnetic field sensor operated at 425 MHz

Author

Bodong Li ; Kosel, Jurgen

Author_Institution

King Abdullah Univ. of Sci. & Technol., Thuwal, Saudi Arabia

fYear

2013

fDate

16-20 June 2013

Firstpage

466

Lastpage

469

Abstract

A passive, magnetic field sensor consisting of a 425 MHz surface acoustic wave (SAW) transponder loaded with a giant magnetoimpedance (GMI) element is developed. The transponder, consisting of two interdigital transducers (IDTs) and the GMI element, a multilayer structure composed of Ni₈₀Fe₂₀/Cu/Ni₈₀Fe₂₀, are fabricated on a 128° Y-X cut LiNbO₃ substrate. The integrated sensor is characterized with a network analyzer through an S-parameter measurement. Upon the application of a magnetic field, a maximum amplitude change and phase shift of 2.7 dB and 20 degree, respectively, are observed. Within the linear region, the magnetic sensitivity is 3870 dB/T and the resolution is 1.3 μT.

Keywords

S-parameters; copper; giant magnetoresistance; interdigital transducers; iron alloys; magnetic field measurement; magnetic multilayers; magnetic sensors; nickel alloys; sensitivity; surface acoustic wave devices; thin film sensors; GMI element; IDT; LiNbO₃; Ni₈₀Fe₂₀-Cu-Ni₈₀Fe₂₀; S-parameter measurement; SAW transponder; frequency 425 MHz; giant magnetoimpedance element; interdigital transducers; magnetic sensitivity; maximum amplitude change; multilayer structure; network analyzer; phase shift; surface acoustic wave transponder; thin film passive magnetic field sensor; Magnetic field measurement; Magnetic fields; Magnetic multilayers; Magnetoacoustic effects; Sensitivity; Substrates; Surface acoustic waves; GMI; Magnetoimpedance; Passive Sensor; SAW; Surface Acoustic Wave; Wireless Magnetic Sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6626804

Filename

6626804