Lead-free piezoelectric MEMS energy harvesters of stainless steel cantilevers

Author

Tsujiura, Y. ; Suwa, E. ; Hida, Hirotaka ; Suenaga, K. ; Shibata, Kenji ; Kanno, Issei

Author_Institution

Kobe Univ., Kobe, Japan

fYear

2013

fDate

16-20 June 2013

Firstpage

474

Lastpage

477

Abstract

We fabricated piezoelectric MEMS energy harvesters (EHs) of lead-free (K, Na)NbO₃ (KNN) thin films on microfabricated stainless steel cantilevers. The 2.2-μm-thick KNN thin films were directly deposited by rf-magnetron sputtering onto the cantilevers, thereby we could simplify fabrication process of the EHs. Because of the strong fracture toughness of stainless steel, the thickness of the cantilevers can be as thin as 30 μm. We obtained large averaged output power of 1.6 μW at 393 Hz and 10 m/s² for the lead-free unimorph cantilever.

Keywords

energy harvesting; microfabrication; micromechanical devices; piezoelectric thin films; piezoelectric transducers; potassium compounds; sodium compounds; sputtered coatings; stainless steel; (KNa)NbO₃; MEMS energy harvester; RF magnetron sputtering; fracture toughness; lead free unimorph cantilever; lead-free piezoelectric MEMS; microfabricated stainless steel cantilever; power 1.6 muW; size 2.2 mum; thin films; Acceleration; Frequency measurement; Micromechanical devices; Power generation; Resonant frequency; Steel; Vibrations; Energy Harvesting; Lead-Free; Metal Substrate; Piezoelectric Thin Film;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6626806

Filename

6626806