A low phase-noise Pierce oscillator using a piezoelectric-on-silica micromechanical resonator

Author

Wu, Z.Z. ; Thakar, V.A. ; Peczalski, A. ; Rais-Zadeh, Mina

Author_Institution

Electr. Eng. Dept., Univ. of Michigan, Ann Arbor, MI, USA

fYear

2013

fDate

16-20 June 2013

Firstpage

490

Lastpage

493

Abstract

In this paper, we report on a low phase-noise 4.9 MHz oscillator using a fused silica micro-mechanical resonator. The resonator is implemented using a piezoelectric-on-silica structure, achieving high quality factor (Q ~15,860) and low motional impedance (R_m ~360 Ω). By interfacing the resonator to a CMOS amplifier, an oscillator phase noise of -138 dBc/Hz at 1 kHz, -154 dBc/Hz at 10 kHz, and -155 dBc/Hz at far-from-carrier offset frequencies has been achieved at a low-supply voltage. Vibration tests on the oscillator indicate an acceleration sensitivity of less than 4 ppb/g. The frequency tuning properties of the silica oscillator are also characterized for compensating frequency variations due to environmental effects.

Keywords

CMOS analogue integrated circuits; amplifiers; crystal resonators; micromechanical resonators; oscillators; silicon compounds; CMOS amplifier; SiO₂; frequency 4.9 MHz; high quality factor resonator; low phase noise Pierce oscillator; piezoelectric-on-silica micromechanical resonator; vibration test; Micromechanical devices; Phase noise; Resonant frequency; Silicon compounds; Tuning; Vibrations; MEMS; acceleration sensitivity; micromechanical; oscillator; phase noise; piezoelectric tuning; resonator;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6626810

Filename

6626810