Electrical properties and synthesis of spray-pyrolyzed SrBi/sub 2/Ta/sub 2/O/sub 9/ ferroelectric thin films

Ferroelectric thin film have merits of high dielectric constant, low coercive field, high remanent polarization, stable physical and chemical properties, low leakage current density[1]. Scott et al.[2] announced that the fatigue-free SBT have excellent fatigue and data retention lifetime. SBT ferroelectric film have been synthesized by techniques including sputtering, MOCVD and so on. Spray pyrolysis is an economic processing for the fabrication of inorganic oxide films and powders with sizes of micron-scale and nano-scale, but the literature on the fabrication and electrical characteristics of ferroelectric thin films by spray pyrolysis are relatively very few.