• DocumentCode
    3454876
  • Title

    Tunable hydrogel microlens with built-in polymer waveguide and fiber clamp for MEMS applications

  • Author

    Guan, T. ; Ceyssens, F. ; Puers, Robert

  • Author_Institution
    ESAT-MICAS, KU Leuven, Leuven, Belgium
  • fYear
    2013
  • fDate
    16-20 June 2013
  • Firstpage
    522
  • Lastpage
    525
  • Abstract
    This paper presents a photolithographically patterned hydrogel microlens with tunable focal length. EpoClad and EpoCore epoxies are microfabricated to form the integrated optical platform, combining the mechanical fiber clamps, waveguides and the gel setup. The optical focus of the microlens can be adapted by controlling the absorption of a fluid. The focal length can be modulated from 0.3 mm to 1 mm. Placed between two optical waveguides, the microlens acts as light intensity modulator that can change the transmitted intensity up to a factor of 8.
  • Keywords
    hydrogels; integrated optics; micro-optomechanical devices; microfabrication; microlenses; optical fibre fabrication; optical focusing; optical modulation; optical polymers; photoresists; EpoClad epoxy; EpoCore epoxy; MEMS application; built-in polymer waveguide; integrated optical platform; light intensity modulator; mechanical fiber clamp; microfabrication; optical microlens focus; optical waveguide; photolithographically patterned hydrogel microlens; tunable focal length; tunable hydrogel microlens; Clamps; Lenses; Microoptics; Optical fibers; Polymers; EpoClad; EpoCore; hydrogel; microlens;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
  • Conference_Location
    Barcelona
  • Type

    conf

  • DOI
    10.1109/Transducers.2013.6626818
  • Filename
    6626818