DocumentCode
3454876
Title
Tunable hydrogel microlens with built-in polymer waveguide and fiber clamp for MEMS applications
Author
Guan, T. ; Ceyssens, F. ; Puers, Robert
Author_Institution
ESAT-MICAS, KU Leuven, Leuven, Belgium
fYear
2013
fDate
16-20 June 2013
Firstpage
522
Lastpage
525
Abstract
This paper presents a photolithographically patterned hydrogel microlens with tunable focal length. EpoClad and EpoCore epoxies are microfabricated to form the integrated optical platform, combining the mechanical fiber clamps, waveguides and the gel setup. The optical focus of the microlens can be adapted by controlling the absorption of a fluid. The focal length can be modulated from 0.3 mm to 1 mm. Placed between two optical waveguides, the microlens acts as light intensity modulator that can change the transmitted intensity up to a factor of 8.
Keywords
hydrogels; integrated optics; micro-optomechanical devices; microfabrication; microlenses; optical fibre fabrication; optical focusing; optical modulation; optical polymers; photoresists; EpoClad epoxy; EpoCore epoxy; MEMS application; built-in polymer waveguide; integrated optical platform; light intensity modulator; mechanical fiber clamp; microfabrication; optical microlens focus; optical waveguide; photolithographically patterned hydrogel microlens; tunable focal length; tunable hydrogel microlens; Clamps; Lenses; Microoptics; Optical fibers; Polymers; EpoClad; EpoCore; hydrogel; microlens;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location
Barcelona
Type
conf
DOI
10.1109/Transducers.2013.6626818
Filename
6626818
Link To Document