• DocumentCode
    3455156
  • Title

    A Database For The Etching of LGS in H2SO4: H2O

  • Author

    Tellier, C.R. ; Akil, M. ; Leblois, T.G.

  • Author_Institution
    Inst. FEMTO-ST, Besancon
  • fYear
    2007
  • fDate
    May 29 2007-June 1 2007
  • Firstpage
    672
  • Lastpage
    677
  • Abstract
    Twelve differently oriented LGS plates were etched in a H2SO4: H2O solution. 2D etching shapes (profilometry traces and out-of-roundness profiles) were analyzed to determine the dissolution constants that characterize the anisotropy. After adjustments theoretical etching shapes derived from the self-elaborated simulator TENSOSIM were found to be in close agreement with experimental shapes supporting the validity of the present database.
  • Keywords
    etching; plates (structures); H2SO4:H2O; LGS plates; TENSOSIM self-elaborated simulator; anisotropy; dissolution constants; etching database; Anisotropic magnetoresistance; Chemicals; Crystalline materials; Databases; Micromachining; Micromechanical devices; Shape; Surface topography; Water; Wet etching;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Frequency Control Symposium, 2007 Joint with the 21st European Frequency and Time Forum. IEEE International
  • Conference_Location
    Geneva
  • ISSN
    1075-6787
  • Print_ISBN
    978-1-4244-0646-3
  • Electronic_ISBN
    1075-6787
  • Type

    conf

  • DOI
    10.1109/FREQ.2007.4319159
  • Filename
    4319159
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3455156