Title :
Fabrication of Self-Assembled Ni Nanocrystal Flash Memories Using a Polymeric Template
Author :
Shahrjerdi, D. ; Sarkar, J. ; Gao, X. ; Kelly, D.Q. ; Banerjee, S.K.
Author_Institution :
Microelectronics Research Center, Univ of Texas at Austin, Austin, TX, 78758. Email: davood@mail.utexas.edu, Phone: (512)232-4690, Fax: (512)471-5625
Keywords :
Fabrication; Flash memory; Nanocrystals; Nickel; Polyimides; Polymers; Scalability; Self-assembly; Temperature; Voltage;
Conference_Titel :
Device Research Conference, 2006 64th
Conference_Location :
State College, PA, USA
Print_ISBN :
0-7803-9748-7
DOI :
10.1109/DRC.2006.305177
