Title :
Piezoelectric properties of SixGe1-xO2 crystals
Author :
Balitsky, Vladimir ; Detaint, Jacques ; Armand, Pascale ; Papet, Philippe ; Balitsky, Denis
Author_Institution :
Inst. of Exp. Miner. RAS, Chernogolovka
fDate :
May 29 2007-June 1 2007
Abstract :
We report a first measurement of several elastic, piezoelectric, and dielectric characteristics of Si0.93Ge0.07O2 crystals. This was made using the thickness modes of plates of several simple orientations, using normal and/or lateral excitation. Corrections accounting for energy trapping effect (finite electrode dimension and mass loading) or stray capacitances were made after the measurements when partially electroded plates were used. The most interesting features of SixGe1-xO2 crystals already demonstrated are mainly the extremely reduced OH concentration, the existence of compensated cuts, the larger piezoelectric constants and the increased temperature of the alpha-beta phase transition.
Keywords :
dielectric materials; elastic constants; elasticity; electroplating; germanium compounds; piezoelectricity; polymorphic transformations; silicon compounds; SiGeO2; dielectric characteristics; elastic characteristics; electroded plates; energy trapping effect; finite electrode dimension; mass loading; piezoelectric constants; piezoelectric properties; stray capacitances; Crystalline materials; Crystals; Dielectric materials; Dielectric measurements; Frequency measurement; Piezoelectric materials; Q factor; Resonance; Temperature; Thermal stability;
Conference_Titel :
Frequency Control Symposium, 2007 Joint with the 21st European Frequency and Time Forum. IEEE International
Conference_Location :
Geneva
Print_ISBN :
978-1-4244-0646-3
Electronic_ISBN :
1075-6787
DOI :
10.1109/FREQ.2007.4319166
