DocumentCode
3455447
Title
A silicon microseismometer for Mars
Author
Pike, W.T. ; Standley, I.M. ; Calcutt, S.
Author_Institution
Dept. of Electr. & Electron. Eng., Imperial Coll. London, London, UK
fYear
2013
fDate
16-20 June 2013
Firstpage
622
Lastpage
625
Abstract
The design, fabrication and testing of a microseismometer for the InSight mission to Mars and described. Particular challenges include accommodation of Martian gravity while allowing testing on Earth and surviving the 2000g shock profile of the mission while maintaining a nano-g sensitivity.
Keywords
Earth; Mars; elemental semiconductors; gravimeters; gravity; microfabrication; microsensors; seismometers; silicon; Earth; InSight mission; Mars; Martian gravity; Si; mass 2000 g; nano-g sensitivity; shock profile; silicon microseismometer; Earth; Electric shock; Mars; Noise; Suspensions; Testing; Transducers; Micromachined accelerometer suspension shock planetary;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location
Barcelona
Type
conf
DOI
10.1109/Transducers.2013.6626843
Filename
6626843
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