DocumentCode
3455549
Title
SH Wave Propagation in Semiconductor/Piezoelectric Structures
Author
Du, Jianke ; Jin, Xiaoying ; Wang, Ji
Author_Institution
Ningbo Univ., Ningbo
fYear
2007
fDate
May 29 2007-June 1 2007
Firstpage
749
Lastpage
753
Abstract
SH wave propagation in a piezoelectric half-space covered by a semiconductor film with initial stress is investigated analytically. The equilibrium equations for semiconductors with initial stress are presented. The dispersion relation of SH waves is obtained for different thickness of the film and wavenumber.
Keywords
acoustic dispersion; acoustic wave propagation; acoustoelectric devices; piezoelectric materials; semiconductor thin films; SH wave propagation; dispersion relation; equilibrium equations; initial stress; piezoelectric half-space; semiconductor film; semiconductor/piezoelectric structures; wavenumber; Acoustic propagation; Acoustic waves; Acoustoelectric effects; Dispersion; Equations; Piezoelectric devices; Piezoelectric films; Residual stresses; Semiconductor films; Surface waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency Control Symposium, 2007 Joint with the 21st European Frequency and Time Forum. IEEE International
Conference_Location
Geneva
ISSN
1075-6787
Print_ISBN
978-1-4244-0646-3
Electronic_ISBN
1075-6787
Type
conf
DOI
10.1109/FREQ.2007.4319176
Filename
4319176
Link To Document