Fabrication of micro-probe beam using MEMS technology for new vertical silicon probe card

Author

Mm, Y. ; Yoon, Ho-Cheol ; Seo, Chang-Taeg ; Lee, Jong-Hyun

fYear

2004

fDate

Oct. 27-29, 2004

Firstpage

270

Lastpage

271

Keywords

Annealing; Etching; Fabrication; Micromachining; Micromechanical devices; Needles; Probes; Silicon; Testing; Very large scale integration;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International

Print_ISBN

4-99024720-5

Type

DOI

10.1109/IMNC.2004.245646

Filename

1459580

Link To Document