• DocumentCode
    3455568
  • Title

    Direct modification near the interface of SiO2/Si[001] by low energy N+ ion beam irradiation

  • Author

    HACHIUE, Syunsuke ; Teraoka, Yuden

  • fYear
    2004
  • fDate
    Oct. 27-29, 2004
  • Firstpage
    272
  • Lastpage
    273
  • Keywords
    Bonding; Filters; Ion beams; Ion sources; Kinetic energy; Photoelectricity; Plasma accelerators; Plasma sources; Plasma transport processes; Synchrotron radiation;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
  • Print_ISBN
    4-99024720-5
  • Type

    conf

  • DOI
    10.1109/IMNC.2004.245647
  • Filename
    1459581
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3455568