Title :
Implementation of electrostatically controlled Fabry-Perot interferometer using nanoporous anodic aluminum oxide layer
Author :
Lo, P.-H. ; Lee, C.-C. ; Fang, Wanliang
Author_Institution :
Inst. of NanoEngineering & Microsyst., Nat. Tsing Hua Univ., Hsinchu, Taiwan
Abstract :
This study presents the use of nanoporous anodic aluminum oxide (np-AAO) for Fabry-Perot interferometer (FPI). The merits of this np-AAO Fabry-Perot interferometer are as follows, (1) in-use stiction of the actuation np-AAO membrane can be reduced by the nanoporous textures, (2) dielectric charging can be largely reduced by np-AAO material in this study, thus the offset voltage of the polarities close to zero and hysteresis curves are symmetric [1], (3) driving (pull-in) voltage can be reduced due to superior dielectric constant (ε=7.05) of np-AAO [2], and (4) in addition, refractive index can be adjusted by pore size [3]. The tests demonstrate the performance of presented Fabry-Perot interferometer.
Keywords :
Fabry-Perot interferometers; alumina; anodised layers; dielectric hysteresis; microactuators; nanoporous materials; permittivity; refractive index; stiction; Al2O3; actuation np-AAO membrane; dielectric charging; dielectric constant; driving voltage; electrostatically controlled Fabry-Perot interferometer; in-use stiction; nanoporous anodic aluminum oxide layer; offset polarity voltage; pore size; refractive index; symmetric hysteresis curves; Adhesives; Color; Fabry-Perot interferometers; Films; Force; Hysteresis; Micromechanical devices; Fabry-Perot interferometer; Nanoporous anodic aluminum oxide (np-AAO);
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6626857